5 V, 1.5 µm CMOS, 1 PolySi, 1 Me, 150mm wafers

Main

Products

Base Technology Process

CMOS processes

5 V, 1.5 µm CMOS, 1 PolySi, 1 Me, 150mm wafers

Specifications
Purchase and tech. support

Parameter	Meaning
Application, features	Digital IMC, microcontrollers with VDD= 5V NMOS: Vtn= 0.6V, Usd >10 V PMOS: Vtp= 1.0V, Usd >13 V
Process Description	Number of masks, pcs. 16 Design rule,µm 1.5 Substrate: Si/B-doped/ p-type/Res 12 2 wells N/P-well depth, µm 5/6 Interlayer dielectric: BPSG Gate SiO2, Å 250 Interlayer dielectric: BPSG Transistor built in ROM Buried contacts Channel length: NMOS/PMOS, µm 1.5 N & P LDD- drains space line PolySi,µm 2.5 contacts, µm Ø 1.5 space line Me,µm 3.5

Parameter

Meaning

Application, features

Digital IMC, microcontrollers with VDD= 5V

NMOS: Vtn= 0.6V, Usd >10 V

PMOS: Vtp= 1.0V, Usd >13 V

Process Description

Number of masks, pcs.                                                    16

Design rule,µm                                                                 1.5

Substrate:                 Si/B-doped/ p-type/Res 12      2 wells

N/P-well depth, µm                                                           5/6

Interlayer dielectric:                                                      BPSG

Gate SiO2, Å                                                                     250

Interlayer dielectric:                                                     BPSG

Transistor built in ROM

Buried contacts

Channel length: NMOS/PMOS, µm                              1.5

N & P LDD- drains

space line PolySi,µm                                                       2.5

contacts, µm                                                                  Ø 1.5

space line Me,µm                                                             3.5

To order

The order, cost and terms of fulfillment of orders for the supply of small-scale batches of products are additionally agreed by the Consumer with the marketing and sales services of OJSC "INTEGRAL" - the management company of the holding "INTEGRAL"

Marketing & Sales Department
Tel.: .....(+375 17) 272 3729
......(+375 17) 353 2257
Fax:......(+375 17) 353 2257
E-mail: export@integral.by