5 V, 1.5 µm CMOS, 1 PolySi, 2 Me

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5 V, 1.5 µm CMOS, 1 PolySi, 2 Me

Specifications
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Parameter	Meaning
Application, features	Small and medium-scale integration logic IC, VDD < 5 V NMOS: Vtn= 0.8 V, Usd >12 V PMOS: Vtp= -0.8 V, Usd >12 V
Process Description	Number of masks, pcs. 14 Design rule,µm 1.5 Substrate: Si/ P-doped/n-type/Res 4.5 N/P-well depth, µm 5/5 Interlayer dielectric: BPSG Interlevel dielectric: PE oxide Gate SiO2, Å 245 Channel length: NMOS/PMOS,µm 1.4/2.0 N LDD-drains space line PolySi , µm 3.4 contacts 1, µm 1.54.5 space line Me 1, µm 6.0 contacts 2, µm 3.04.5 space line Me 2, µm 9.5

Parameter

Meaning

Application, features

Small and medium-scale integration logic IC, VDD < 5 V

NMOS:

Vtn= 0.8 V, Usd >12 V

PMOS:

Vtp= -0.8 V, Usd >12 V

Process Description

Number of masks, pcs.                                            14

Design rule,µm                                                      1.5

Substrate:                        Si/ P-doped/n-type/Res 4.5

N/P-well depth, µm                                                5/5

Interlayer dielectric:                                            BPSG

Interlevel dielectric:                                        PE oxide

Gate SiO2, Å                                                          245

Channel length:

NMOS/PMOS,µm                                             1.4/2.0

N LDD-drains

space line PolySi , µm                                            3.4

contacts 1, µm                                                     1.5*4.5

space line Me 1, µm                                              6.0

contacts 2, µm                                                     3.0*4.5

space line Me 2, µm                                              9.5

To order

The order, cost and terms of fulfillment of orders for the supply of small-scale batches of products are additionally agreed by the Consumer with the marketing and sales services of OJSC "INTEGRAL" - the management company of the holding "INTEGRAL"

Marketing & Sales Department
Tel.: .....(+375 17) 272 3729
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E-mail: export@integral.by