3-5 V, 0.8 µm CMOS, 1 PolySi (2 PolySi), 2 Me, 200mm wafers

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3-5 V, 0.8 µm CMOS, 1 PolySi (2 PolySi), 2 Me, 200mm wafers

Specifications
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Parameter	Meaning
Application, features	IC for telephony, customized IC, VDD 3 V… 5 V NMOS: Vtn=0.6 V, Usd >10 V PMOS: Vtр=-0.7 V, Usd >10 V
Process Description	Number of masks, pcs. 14 (16) Design rule,µm 0.8 Substrate: Si/ P-doped/n-type/Res 4.5 or Si/B-doped/ p-type/Res 12; 2 wells N/P-wells depth, µm 4/4 Interlayer dielectric: SACVD SiO2 + PE (TEOS) 1,05 µm Gate SiO2, Å 130/160 NMOS/PMOS channel length, µm 0.9/1.0 N&P LDD- drains Me I Ti/AlCu/Ti/TiN Space line PolySi,µm 1.9 Contacts 1 (filled in by W), µm Ø 0.7 Space line Me 1, µm 2.2 Me2 Ti/AlCu Contacts 2 (filled in by W),µm Ø 0.7 Space line Me 2, µm 2.4

Parameter

Meaning

Application, features

IC for telephony, customized IC,

VDD 3 V… 5 V

NMOS: Vtn=0.6 V, Usd >10 V

PMOS: Vtр=-0.7 V, Usd >10 V

Process Description

Number of masks, pcs.                                   14 (16)

Design rule,µm                                                    0.8

Substrate:                        Si/ P-doped/n-type/Res 4.5

                     or Si/B-doped/ p-type/Res 12; 2 wells

N/P-wells depth, µm                                           4/4

Interlayer dielectric:

SACVD SiO2 + PE (TEOS)                          1,05 µm

Gate SiO2, Å                                                 130/160

NMOS/PMOS channel length, µm                 0.9/1.0

N&P LDD- drains

Me I                                                    Ti/AlCu/Ti/TiN

Space line PolySi,µm                                           1.9

Contacts 1 (filled in by W), µm                         Ø 0.7

Space line Me 1, µm                                             2.2

Me2                                                               Ti/AlCu

Contacts 2 (filled in by W),µm                        Ø 0.7

Space line Me 2, µm                                             2.4

To order

The order, cost and terms of fulfillment of orders for the supply of small-scale batches of products are additionally agreed by the Consumer with the marketing and sales services of OJSC "INTEGRAL" - the management company of the holding "INTEGRAL"

Marketing & Sales Department
Tel.: .....(+375 17) 272 3729
......(+375 17) 353 2257
Fax:......(+375 17) 353 2257
E-mail: export@integral.by