5 V, 1.6 µm CMOS, 2 PolySi,1 Me, EEPROM, 150 mm wafers

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5 V, 1.6 µm CMOS, 2 PolySi,1 Me, EEPROM, 150 mm wafers

Specifications
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Parameter	Meaning
Application, features	Medium-scale integration EEPROM, VDD:2,4 V… 6 V NMOS: Vtn=(0,65+-0,25)V, Usd >=12 V PMOS: Vtр=-(0,8+-0,2)V, Usd ≤-12 V HV- NMOS: Vtn=(0,45+0,15)V Usd³17 V HV- РMOS: Vtр=-(0,8+0,2)V Usd ≤-16 V
Process Description	Number of masks, pcs. 17 Design rule, µm 1.6 Substrate: Si/B-doped/p-type/Res 12 2 wells N/P-well depth, µm 5/6 Gate SiO2, Å 425 Tunnel SiO2, Å 77 Interlayer dielectric-1: Si3N4, Å 350 Interlayer dielectric -2: BPSG, Å 7000 Built-in transistors Channel length: NMOS/PMOS Low-voltage transistors, µm 2.4 High- voltage transistors, µm 3.6 Space line PolySi 1, µm 3.2 Space line PolySi 2, µm 4.2 Contacts, mm Ø 1.2 Space line Me, µm 4.4

Parameter

Meaning

Application, features

Medium-scale integration EEPROM, VDD:2,4 V… 6 V

NMOS: Vtn=(0,65+-0,25)V,

Usd >=12 V

PMOS: Vtр=-(0,8+-0,2)V,

Usd ≤-12 V

HV- NMOS: Vtn=(0,45+0,15)V Usd³17 V

HV- РMOS: Vtр=-(0,8+0,2)V Usd ≤-16 V

Process Description

Number of masks, pcs.                                             17

Design rule, µm                                                       1.6

Substrate: Si/B-doped/p-type/Res 12               2 wells

N/P-well depth, µm                                                 5/6

Gate SiO2, Å                                                          425

Tunnel SiO2, Å                                                       77

Interlayer dielectric-1: Si3N4, Å                           350

Interlayer dielectric -2: BPSG, Å                           7000

Built-in transistors

Channel length: NMOS/PMOS

Low-voltage transistors, µm                                     2.4

High- voltage transistors, µm                                    3.6

Space line PolySi 1, µm                                           3.2

Space line PolySi 2, µm                                           4.2

Contacts, mm                                                        Ø 1.2

Space line Me, µm                                                   4.4

To order

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