15 V, p-n junction isolation

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15 V, p-n junction isolation

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Parameter	Meaning
Application, features	Small and medium-scale integration digital-analogue IC, VDD < 18 V NPN Vertical: bn=150 Uce=28 V РNP Lateral: bр=35 Uсе=45 V РNP Vertical: bр=35 Uсе=45 V Capacitor:Ме-n+emitter Resistors in PolySi layer
Process Description	Number of masks, pcs. 10-13 Mean design rule,µm 6.0 Substrate: Si/B-doped/ p-type/ Thk 460/ Res 10/ (111) Buried layers: Si/Sb-doped/ n -type/Thk 6.0/Res 20; Si/B-doped/ p-type/Thk 1.95/Res210; Epi layer: Si/ P-doped/ n-type/ Thk 8/ Res 4.5; Isolation: p-n junction p-base depth, µm 2.4 N+emitter depth, µm 1.7 Emitter size, µm 6 Distance between transistors, µm 6 Switching: contacts 1, µm 4 space line Me 1, µm 13

Parameter

Meaning

Application, features

Small and medium-scale integration digital-analogue IC, VDD < 18 V

NPN Vertical:

bn=150 Uce=28 V

РNP Lateral:

bр=35 Uсе=45 V

РNP Vertical:

bр=35 Uсе=45 V

Capacitor:Ме-n+emitter

Resistors in PolySi layer

Process Description

Number of masks, pcs.                                                    10-13

Mean design rule,µm                                                             6.0

Substrate:          Si/B-doped/ p-type/ Thk 460/ Res 10/ (111)

Buried layers:              Si/Sb-doped/ n -type/Thk 6.0/Res 20;

                                       Si/B-doped/ p-type/Thk 1.95/Res210;

Epi layer:                         Si/ P-doped/ n-type/ Thk 8/ Res 4.5;

Isolation:                                                                   p-n junction

p-base depth, µm                                                                    2.4

N+emitter depth, µm                                                               1.7

Emitter size, µm                                                                         6

Distance between transistors, µm                                          6

Switching:

contacts 1, µm                                                                             4

space line Me 1, µm                                                                13

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